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Semiconductor International - Sonoluminescence Helps in Design of Megasonic Cleaning System
Sonoluminescence Helps in Design of Megasonic Cleaning System by
P. Engesser, G. Ferrell, A. Gleissner,
J. Klitzke, M. Koffler, F. Kumnig,
A. Lippert, R. Obweger, A. Pfeuffer,
H. Sax, H. Okorn-Schmidt; SEZ AG
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