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SEZ 203
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Chambers: 1 Chemicals: 3 Wafersize: 125mm, 150mm, 200mm
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SEZ 223
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Chambers: 2 Chemicals: 3 Wafersize: 150mm, 200mm
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SEZ 323
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Chambers: 2 Chemicals: 3 Wafersize: 200mm, 300mm
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SEZ 304
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Chambers: 1 Chemicals: 3 Wafersize: 200mm, 300mm
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SEZ 4300
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Chambers: 4 Chemicals: 2 Wafersize: 300mm
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