|
|
MICROMagazine.com - SEZ hopes to make big splash with FEOL wet-cleaning tool
Written by: Tom Cheney
I've heard or endured hundreds of new product and technology launch spiels over the years, from the most expensive deep-UV 193-nm lithography tools to elegant widgets that supposedly help a gas panel, liquid delivery system, or robotic array work better. Sometimes a launch is just a launch, other times there's a lot more at stake. SEZ may not be betting the store with the rollout of its new Esanti front-end-of-line (FEOL) single-wafer wet-cleaning tool, but it's not just another plainwrap product launch either.
Read full article...
|