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SEZ Offers First Double Sided Single-Wafer Spin-Processor
VILLACH, Austria, May 2, 2000 - The SEZ Group has announced its newest platform aimed at capturing the mass market for pre-diffusion wafer cleaning, the Spin-Processor 8200. The tool is SEZ's first single wafer tool that simultaneously cleans both wafer frontside and backside.
"SEZ has been aggressively developing a product to compete directly with wet benches," explained Hans Kruwinus, vice president of research and development for SEZ AG. "Customers are looking for a solution that guarantee excellent process control while offering the highest possible throughput and lowest materials usage, thus minimizing cost of ownership. The 8200 meets all of these requirements."
SEZ has placed its first Spin-Processor 8200 with a major European semiconductor manufacturer to complete production worthiness evaluation. Full feasibility and alpha testing have already been successfully completed at SEZ's headquarters in Villach and results demonstrate that the tool is a viable competitor to existing wet bench technology. Production-worthy systems will be available for shipment beginning in the first quarter of 2001.
A four-chamber tool, the 8200 is upgraded from the company's Spin-Processor 4200 by incorporating a double sided cleaning system. The 8200 offers the advantages of single wafer cleaning tools, such as better uniformity and the elimination of cross-contamination, while keeping the advantages of batch tools, such as high throughput and the possibility of hydrophilic or hydrophobic surface termination without water marks.
About SEZ
The SEZ Group is a leading supplier of spin-processing equipment to the global semiconductor manufacturing industry. The company's breakthrough proprietary Spin-Processor technology forms the basis of a broad portfolio of backside and frontside wafer surface conditioning products for semiconductor chipmakers worldwide. SEZ maintains development, manufacturing, sales, marketing and service operations in Europe, Asia and North America. Registered in Zurich, Switzerland, SEZ Holding AG is listed on the Swiss Exchange under the symbol (SWX: SEZN).
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