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SEZ and Ashland Forge Strategic Alliance Targeting Polymer Removal
Ashland Specialty Chemical Co., a division of Ashland Inc., to develop chemistries for polymer cleaning at or below 0.18 micron.
The alliance will provide customers a new back-end-of-line post-etch polymer removal application on an equipment platform that offers a throughput-to-footprint ratio exceeding currently available technology.
"We entered into a formal agreement with Ashland Specialty, effective March 22, based on a recent successful collaboration with an Asian customer," explained Sally-Ann Henry, global polymer manager for the process applications group at SEZ AG. "The goal of this agreement is to further develop polymer treatments using our Spin-Processing techniques. Additionally, this will supply our mutual customers with a single process solution."
By combining the expertise of both companies, SEZ and Ashland Specialty expect to produce chemistries that will greatly reduce process times for polymer removal while reducing consumables. This translates into higher throughput and lower cost of ownership for the customer. The strategic alliance will be in effect for a minimum of one year.
"Our work with SEZ has resulted in important breakthroughs that enable the new technologies of the semiconductor industry," said Bob Rohlfing, business unit director of Ashland-ACT, a part of Ashland Specialty Chemical Co.'s Electronic Chemicals Division. "Our product, ACT NE-89, is designed to perform at very short process time (less than 1 min.), is buffered to ensure process stability, and is compatible with aluminum, copper and some low-k films. ACT NE-89 is used in production with SEZ tools for 0.18 micron technologies."
This is the first alliance that Henry has orchestrated since joining SEZ in December 1999. Henry was chartered to take control of development efforts and move SEZ's polymer removal applications group forward. Henry came to SEZ from EKC Technology Inc., where she most recently served as vice president of quality and applications engineering. Henry's areas of expertise include wafer fab processes and photoresist and dry etch residue removers.
"This alliance highlights our reasons for wanting Sally-Ann to join SEZ," explained Michael Kucher, senior vice president for SEZ AG. "The agreement that she has reached with Ashland Specialty will allow SEZ to provide more effective and efficient solutions by developing dynamic chemistries specifically for use with Spin-Processing."
About SEZ
The SEZ Group (SWX:SEZN) is a leading supplier of semiconductor spin-processing equipment to the global semiconductor chip manufacturing industry. The company's breakthrough proprietary spin-processor technology forms the basis of a broad portfolio of backside and frontside wafer surface conditioning products for semiconductor chipmakers worldwide.
SEZ maintains development, manufacturing, sales, marketing and service operations in Europe, Asia and North America. Registered in Zurich, Switzerland, SEZ Holding AG is listed on the Swiss Exchange under the symbol (SWX:SEZN). SEZ can also be found on the World Wide Web at www.sez.com.
About Ashland
Ashland-ACT is a business unit of Ashland Specialty Chemical Co.'s Electronic Chemicals Division, which is a leading supplier of ultrapure chemicals, photoresist strippers and on-site services in chemical management to the global microelectronics industry.
Ashland Specialty Chemical Co., a division of Ashland Inc. (NYSE:ASH-W), is a leading, worldwide supplier of specialty chemicals serving industries including adhesives, automotive, composites, foundry, merchant marine, paint, paper, plastics and semiconductor. Visit our Internet web site at www.ashspec.com to learn more about these operations.
Ashland Inc. (NYSE:ASH-W) provides basic industrial materials and services to customers throughout the world, with a primary focus on transportation- and construction-related markets. Ashland's Internet address is www.ashland.com.
Phoenix, USA, April 3, 2000
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