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SEZ Wins 300 mm Order from New Taiwanese Customer
VILLACH, Austria-November 26, 2001-The SEZ Group (SWX: SEZN) again demonstrated leadership in 300 mm process technology and at the same time expanded its presence in the Asia Pacific region with its first order from a new Taiwanese customer. One of Taiwan's largest DRAM manufacturers placed the order for a double chamber Spin-Processor 323 for its most advanced new 300 mm fabrication line. Delivery is expected in the first half of 2002.
"300 mm continues to be a critical market for the implementation of single wafer Spin-Process technology to address increasingly stringent production requirements," explained Ernst Gaulhofer, Member of the Corporate Executive Board of the SEZ Group "By offering a variety of platforms and numerous process applications, SEZ continues to win new customers around the world for our Spin-Process technology. The tool's flexibility and SEZ's ability to support this customer locally in Taiwan were key factors in winning this order."
The Spin-Processor 323 consists of two four-level chambers using three chemistries for single-sided processing. The 323 platform works with SEZ's current applications including high-volume semiconductor production operations. This includes backside, bevel, edge and frontside exclusion zone copper decontamination, pre-clean for advanced lithography applications.. The tool offers customers high throughput per footprint, excellent process performance, high mean time between failure and low mean time to repair.
About SEZ
The SEZ Group is a leading supplier of wet wafer surface preparation equipment to the global semiconductor manufacturing industry. The company's breakthrough proprietary Spin-Processor technology forms the basis of a broad portfolio of single wafer backside and frontside wafer surface conditioning products for semiconductor chipmakers worldwide. Additionally, the company offers a complete range of wet bench equipment for batch processing. SEZ maintains development, manufacturing, sales, marketing and service operations in Europe, Asia and North America. Registered in Zurich, Switzerland, SEZ Holding AG is listed on the Swiss Exchange under the symbol (SWX: SEZN).
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