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First Double Sided Single Wafer Spin-Processor Available for Cleaning Applications
VILLACH, Austria--January 31, 2001--The SEZ Group (SWX: SEZN) launched its newest Spin-Processor, the 8200, signaling the company's entry into the mass market for front end of line (FEOL) critical pre-cleaning applications. The Spin-Processor 8200 is the first non-contact, single wafer, double sided cleaner available on the market that meets the requirements of next generation technology nodes. With a throughput of up to 200 wafers per hour, the tool offers the proven process capabilities of SEZ Spin-Processing, an alternative to conventional cleaning technologies. The tool has completed production worthiness evaluation and is now available for shipment.
"Low consumables consumption, short treatment times and single wafer processing offers customers many advantages over conventional cleans with an extremely low cost of ownership," explained Ernst Gaulhofer, vice president of field support and applications for the SEZ Group. "As a single-wafer tool, the Spin-Processor 8200 offers the best available wafer to wafer repeatability for cleaning applications. This is SEZ's first pure cleaning tool and gives the company entry into the over $1 billion market for wet cleaning systems."
A four-chamber tool, the 8200 is based on the company's Spin-Processor 4200, with an incorporated double sided cleaning system. A single wafer tool, the Spin-Processor 8200 is capable of immediate uniform coverage of the wafer and better end uniformity while using less chemistry than other systems performing pre-diffusion cleans. The tool also eliminates redeposition and cross-contamination because chemicals are spun off the wafer surface and the wafers are not touched during transport. Additionally, the system offers the same or better throughput than batch processing while eliminating water marks and residue contamination.
SEZ has an extensive global network of service and support capabilities to support its installed tools worldwide and will be especially valuable as SEZ enters the mass market. With local operations around the globe, SEZ offers extensive training programs for its customers. Last year's VLSI Research survey of small ssssuppliers of wafer processing equipment ranked SEZ first in support after sales and fourth overall. Finally, a recent expansion at the company's headquarters in Villach, Austria doubled its production capacity ensuring the company's ability to deliver.
About SEZ
The SEZ Group is a leading supplier of spin-processing equipment to the global semiconductor manufacturing industry. The company's breakthrough proprietary Spin-Processor technology forms the basis of a broad portfolio of backside and frontside wafer surface conditioning products for semiconductor chipmakers worldwide. SEZ maintains development, manufacturing, sales, marketing and service operations in Europe, Asia and North America. Registered in Zurich, Switzerland, SEZ Holding AG is listed on the Swiss Exchange under the symbol (SWX: SEZN).
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