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SEZ Delivers 50th Tool to Taiwan
The SEZ Group (Swiss: SEZN) announced that it continues to expand its presence in Asia with delivery of its 50th Spin-Processing system to Taiwan. Taiwan Semiconductor Manufacturing Company (NYSE: TSM - news), took delivery of a Spin-Processor 203 at its TSMC fab5 fab in early June.
Taiwan Semiconductor Manufacturing Company (TSMC) will use the 203 spin processing system for metal contamination removal from the wafer backside, bevel/edge and frontside exclusion zone for 200 mm wafer production.
By combining the expertise of both companies, SEZ and Ashland Specialty expect to produce chemistries that will greatly reduce process times for polymer removal while reducing consumables. This translates into higher throughput and lower cost of ownership for the customer. The strategic alliance will be in effect for a minimum of one year.
"TSMC has aggressively pursued capacity expansions around the world to support the demand for our cutting edge process technology," explained Mr. Shang-yi Chiang, vice president R&D department of TSMC. "SEZ's Spin-Processing is the logical partner for our future technology developments for production at 0.13 micron and below."
The Taiwanese market, especially its numerous foundries, has offered a significant growth opportunity for SEZ in Asia. Current industry growth is driven by capacity increases, technology advances in 300 mm and a strong DRAM and SRAM market.
Since 1996 when it delivered its first tool in Taiwan, SEZ's Spin-Process technology is mainly used for backside film removal and clean, copper low -k polymer removal, copper backside and bevel cleans, selective oxide etch and pre-gate cleans.
"Taiwan is a critical marketplace that is driving next-generation wafer production," explained Michael Kucher, senior vice president for the SEZ Group. "Recent and ongoing facilities expansions demonstrate the strength of Taiwan's market. SEZ will continue to participate in its growth by supplying both the technology and local service and support required by our customers."
Committed to its customers in Taiwan, SEZ has a strategic investment in ICS Technology Co. Ltd. (ICS) with more than 20 sales and service employees representing SEZ locally. SEZ has a Spin-Processor 203 in ICS' class 10 laboratory, which also provides metrology for qualifiable evaluations of SEZ's technology for customers. Improved response and higher levels of process integration are provided at the facility in collaboration with some of SEZ's strategic partners.
"ICS offers us a unique opportunity to demonstrate the capabilities of Spin-Processing to all of the semiconductor manufacturers based in Taiwan," explained David Wu, ICS director and SEZ representative in Taiwan. "Taiwan, and Asia as whole, is rapidly adopting spin-process technology and we're expecting to see a continued increase in business here."
About SEZ
The SEZ Group is a leading supplier of spin-processing equipment to the global semiconductor manufacturing industry. The company's breakthrough proprietary Spin-Processor technology forms the basis of a broad portfolio of backside and frontside wafer surface conditioning products for semiconductor chipmakers worldwide. SEZ maintains development, manufacturing, sales, marketing and service operations in Europe, Asia and North America. Registered in Zurich, Switzerland, SEZ Holding AG is listed on the Swiss Exchange under the symbol.
Villach, Austria, June 21, 2000
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