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2002 European SEMI Award Presented to Franz Sumnitsch
Semiconductor Equipment and Materials Industry Honors Innovator of Spin Processor Technology for Chip Manufacturing
MUNICH, Germany, April 17, 2002 -- Franz Sumnitsch, vice chairman of the Board of Directors of SEZ Holding Ltd and CEO of the SEZ Group, was honored here last night by Semiconductor Equipment and Materials International (SEMI) for his substantial contribution to the semiconductor industry. He received the European SEMI Award for 2002 at an industry association reception held at the Munich Messe during the annual SEMICON Europa Exposition.
Franz Sumnitsch is recognized for developing a spin processing approach for semiconductor manufacturing. The new single wafer wet processing technology was introduced in 1989 and subsequently became a major, globally accepted process technology for chip makers worldwide.
"The semiconductor manufacturing industry has greatly benefited from the development of spin processing technology," said Walter Roessger, president of SEMI Europe. "Through his dedication, and innovation, Franz Sumnitsch has made a significant contribution to the advancement of the global microelectronics industry. SEMI members in Europe and around the world applaud Franz's important accomplishments with the European SEMI Award.
"The SEZ spin processor was the first single wafer wet process equipment introduced for semiconductor manufacturing. Its development established Sumnitsch as a trendsetter, as today single wafer wet chemical surface treatment is a prominent technology for chip production.
Sumnitsch graduated from the Mechanical Engineering Polytechnic (HTL). In 1986 he co-founded SEZ with Egon Putzi. Prior to that, he served as a department manager in wet equipment and chemistry supply systems in manufacturing technology at Austria Mikro Systeme International AG (AMS), Unterpremstätten, Austria, a company specializing in application-specific integrated circuits (ASICs).
Wet chemical processing engineering was among Sumnitsch's main responsibilities at AMS, where, together with his partner Egon Putzi, he realized the limitations of existing wet process approaches and searched for a solution to optimize certain process steps. They conceived an innovative single wafer technology. Franz Sumnitsch is credited with providing the original ideas and concepts, the equipment design, and the overall process solution and integration.
Sumnitsch holds 12 patents associated with semiconductor industry, including the basic patents related to SEZ's proprietary spin process technology.
About SEMI
Based in Brussels, Belgium, SEMI Europe is the European regional office of Semiconductor Equipment and Materials International (SEMI), an international industry association serving 2,500 companies that provide equipment, materials and services to the global semiconductor and related industries. SEMI maintains offices in Austin, Beijing, Boston, Brussels, Hsinchu, Moscow, San Jose, Seoul, Singapore, Tokyo and Washington, D.C. Visit SEMI at
www.semi.org.
About SEZ
About SEZ Founded in 1986 the international SEZ Group is a leading supplier of advanced wafer spin-process equipment to the global semiconductor industry. The company's breakthrough proprietary spin-process technology forms the basis of a broad portfolio of backside and frontside wafer surface conditioning products for the chip making industry worldwide. SEZ maintains development, manufacturing, sales, marketing and service operations in Europe, Asia-Pacific, Japan and North America.
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