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SEZ Moves Forward with Single-Wafer Focused Strategy and Secures Multiple Tool Order From Leading Taiwanese Foundry
SEZ Spin-Processors Chosen Over Competitive Single-Wafer Alternative

SHANGHAI, China, March 12, 2003 - After the recent announcement by the SEZ Group (Swiss Exchange SWX: SEZN) to refocus on single-wafer technology, whose new strategy has been very well received by the market, the company is proud to announce receipt of an order for multiple Single-Wafer Spin-Processors from a major Taiwanese semiconductor foundry. Post-etch residue removal success and reduced cost-of-ownership lead to the follow-on orders and competitive win, says chief marketing officer and company spokesperson, Kurt Lackenbucher.

The customer, who recently awarded SEZ its "Best Supplier Award for 2002," has opted to replace currently installed tools with the SEZ SP4200, a high-throughput, four-chamber tool for front side applications, post ash residue removal on vias and metal lines for Flash Memory and Logic products. The tools are scheduled for delivery in Q1 and Q2 2003.

"The tool's throughput is highly competitive and outperforms other production tools in terms of process quality and tool reliability," commented an executive officer of SEZ's Asia Pacific Business Unit. "This increases SEZ's market dominance in both foundries and memory fabs in Taiwan."

"These repeat orders show customer confidence in SEZ and realization of our single-wafer products as a mainstream technology," said Lackenbucher. "SEZ spin-processor tools have been used for a number of years in high-volume production, and are currently installed in all Taiwanese foundries and every leading fab in China. With China quickly developing into the newest and fastest growing market for semiconductor equipment, SEZ's customer-oriented solution strategy ensures continued expansion within this region."

SEZ has installed its tools in every large diameter wafer fab company in China. SEZ is the front-runner in single-wafer treatment, with over 700 single-wafer tools, representing over 1000 process chambers installed in fabs worldwide. SEZ is implementing an integrated customer support strategy in Asia Pacific, including in China, to capitalize on its leadership position and 15 years of experience with single-wafer tools in high-volume IC production.

About SEZ
The SEZ Group is a leading supplier of wet wafer surface preparation equipment to the global semiconductor manufacturing industry. The company's proprietary Spin-Processor technology, single-wafer technology, forms the basis of a broad process solution portfolio for wafer cleaning and decontamination. SEZ maintains development, manufacturing, sales, marketing and service operations in Europe, Asia and North America. Registered in Zurich, Switzerland, SEZ Holding AG is listed on the Swiss Exchange under the symbol SEZN since 1996.

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