|
|
EZ Spins into SiLKnet Alliance to Aid Collaborative Low-k Process Development
PHOENIX, Ariz.- February 26, 2002 - The SEZ Group announced today that as one of the newest members of the SiLKnetsm Alliance data network, its spin-processing technology will be used to help streamline fab processes and develop new, compatible products for SiLK™ semiconductor dielectric resins. Since its establishment in July 2001, the SiLKnet Alliance has aimed to develop compatible, production-ready processes for SiLK semiconductor dielectric resins, which has been established as the leading low-k dielectric materials for the 130-nm technology node and beyond.
The adoption of copper and low-k dielectric films is due to come online this year and will be a major portion of the investment toward the 0.13-micron technology migration. This adoption of low-k and copper processes also means new and improved cleaning techniques and greater need for cleaning processes. SEZ will make tools available within the SEZ Demo Lab to SiLKnet Alliance members for testing polymer and etch residue removal chemistries on SEZ's single wafer platform.
"The growing importance of providing enabling applications and solutions for low-k processing was the driving factor in joining the Alliance," stated Jim Mello, vice president of operations for SEZ America. "As part of the Alliance, SEZ will focus on using our single wafer platform in conjunction with chemical vendor alliance members to demonstrate our ability to clean polymer removal residues without adversely effecting the characteristics of the low-k material developed by The Dow Chemical Company."
The SiLKnet Alliance is the first of its kind and marks an important milestone in the industry's adoption of low-k materials. Bringing together a diverse, non-exclusive group of suppliers, the Alliance will build industry-wide integration expertise for SiLK semiconductor dielectric resins, making the move to low-k a lower-risk proposition for customers. Members of the SiLKnet Alliance will have access to a pool of blank and patterned/partially processed SiLK-coated wafers, which will be used to develop new and optimized equipment, materials and processes for SiLK films.
About SiLK Semiconductor Dielectric Resins
The Dow Chemical Company's SiLK resins - a family of spin-on, low-k ILD materials - allow semiconductor manufacturers to increase the speed and performance of their chips by enabling denser circuitry. The first generation of SiLK resin products are rapidly gaining acceptance as the low-k material for volume 130 nm manufacturing and offer k=2.6 for both copper damascene and aluminum/tungsten processing.
About Dow - Advanced Electronic Materials
Dow's Advanced Electronic Materials business provides a variety of materials and technologies to support customer innovation in the electronics industry. Dow is a leading science and technology company that provides innovative chemical, plastic and agricultural products and services to many essential consumer markets. With annual sales of approximately $30 billion, Dow serves customers in more than 170 countries and a wide range of markets that are vital to human progress, including food, transportation, health and medicine, personal and home care, and building and construction, among others. Committed to the principles of sustainable development, Dow and its 50,000 employees seek to balance economic, environmental and social responsibilities.
Additional information on SiLK semiconductor dielectric resins from Dow is available at the Web site www.silk.dow.com. Or, contact Dow's Customer Information Group at 1-800-441-4369. Reference E#1-316G1 to expedite your inquiry.
About SEZ
The SEZ Group is a leading supplier of spin-processing equipment to the global semiconductor manufacturing industry. The company's breakthrough proprietary Spin-Processor technology forms the basis of a broad portfolio of backside and frontside wafer surface conditioning products for semiconductor chipmakers worldwide. SEZ maintains development, manufacturing, sales, marketing and service operations in Europe, Asia and North America. Registered in Zurich, Switzerland, SEZ Holding AG is listed on the Swiss Exchange under the symbol (SWX: SEZN). SEZ also can be found on the world wide web at www.sez.com..
|