The SEZ Group received two volume orders for its Spin-Processors worth CHF 22.2 million [€ 15.1 million/USD 13.3 million]. The volume orders have been received by customers from Singapore and the US and are planned for delivery in the current business year. The order from Singapore came from a major silicon foundry and includes multiple double-chamber Spin-Processors 223. These tools are for treatment of 200 mm wafers and are especially designed for high throughput. Additionally, a large US microchip manufacturer ordered multiple Spin-Processors 304 for the backside treatment of 300 mm wafers.

With these new orders, the management of the SEZ Group sees expectations confirmed that the downturn has bottomed out and indicators point to a rebound. In particular these new orders emphasize the outstanding technological position of the SEZ Group and its unrivalled Spin-Process technology.

About SEZ
The SEZ Group is a leading supplier of wet wafer surface preparation equipment to the global semiconductor manufacturing industry. The company's proprietary Spin-Processor technology (single wafer technology) as well as its wet bench equipment for batch processing forms the basis of a broad equipment solution portfolio for wafer cleaning and decontamination. SEZ maintains development, manufacturing, sales, marketing and service operations in Europe, Asia and North America. Registered in Zurich, Switzerland, SEZ Holding AG is listed on the Swiss Exchange under the symbol SEZN since 1996.

Villach/Zurich, May 29, 2002